Digital Imaging &
Multi-sensing Metrology
VMA-2520
CNC Video Measuring System
Designed to meet the automated metrology requirements of
mechanical parts, electronic devices, dies & molds and
medical devices
The new iNEXIV VMA-2520 has been expressly designed for
three-dimensional workpieces. Though compact and lightweight
in design, it provides a long 200mm Z-axis stroke and a 73.5mm
working distance, enabling easy Z-axis measurement of
mechanical parts, plastic injection molding parts, metal press
parts, electronic devices, dies & molds and medical devices. The
standard 10x zoom optics meets the industry's demanding
needs for superb resolution at high magnifications while offering
a wide field of view at low magnifications. Low distortion optics
and high intensity white LED illumination sources improve
contrast to enhance throughput. This combination assures
reproducible measurements even for colorful parts.
VMA-2520
2
Electron gun
Metal press parts
Connector Plastic injection molding parts
Digital Imaging &
Multi-Sensing Metrology
High-speed, highly-accurate Laser AF (optional)
In addition to the standard Vision AF, an optional high-speed Laser AF with a long
63mm working distance is available. It provides Z-axis height measurements at the
constant accuracy regardless of the optical magnification.
Touch Probes / 3D CAD Off-line Programming (optional)
The iNEXIV VMA-2520 with the Renishaw TP20/TP200 Touch Trigger Probing system
extends 3D parts measurement ability. Also, the new 3D CAD Off-line Program, 3D
Metrology simulator makes the TP programming much easier.
Sophisticated VMA AutoMeasure software
This new VMA AutoMeasure is an evolution of our well-established industry-standard
Metrology software for the NEXIV VMR Series. It provides various functions to easily
conduct tasks ranging from setup, teaching programs and measurements, to
evaluations.
EDF/Stitching Image Processing & Point Cloud Inspection (Optional)
The iNEXIV VMA-2520 captures EDF - Extended Depth of Filed - and Stitching images.
The optional software EDF/Stitching Express works seamlessly for the digital image
archiving and even for the point cloud data export, which can be analyzed with the 3D
CAD Inspection / Reverse Engineering Software.
Main features
Easy and accurate measurements optimized for 3D parts
Nikon has drawn on its state-of-the-art digital technologies to produce a highly
affordable automated measurement system. The iNEXIV VMA-2520's design is
optimized for easy use as well as repeatable and accurate measurement of 3D
parts.
Compact and lightweight
The iNEXIV VMA-2520 is a powerful bench top system designed to use minimum
factory floor space. The main body has a footprint of only 565mm W x 690mm D
x 740mm H (computer and controller separate) and weighs only 72kg (158.7 lb),
yet it still has a 250mm x 200mm x 200mm measuring capability.
Long working distance
The newly developed optical system features a super long 73.5mm working
distance for all magnifications. This allows sufficient three dimensional clearance
for Z-axis measurements even at high magnification.
3
Plastic injection molding parts
Aluminum die casting parts
Drill Bits Stitched EDF Image
Dual Spur Gear EDF Image with 2D CAD Chart
3D CAD Inspection
- SLR Camera Cover
Compact, lightweight design offering an extended
measurement height
Long 200mm Z-axis stroke plus 250mm x 200mm XY
stroke
The VMA-2520 has a unique extendable optical head design that
provides a Z-axis stroke of 200mm. Couple this with an X-Y stage
travel of 250mm x 200mm and you have a system making
measurements of 3D parts such as injection molding parts, metal
parts, electronic devices, molds and medical devices easier to
manage.
Compact, space-saving body weighing 72kg
The VMA-2520 features a space-saving design with a footprint of
just 2000 x 1000mm (main body & PC rack space). Although the
body has a compact design and a height of only 740mm (min), it is
capable of achieving a long 200mm Z-axis stroke, and because its
structure is composed of aluminum-alloy materials, it only weighs
72kg (158.7 lb).
High accuracy
By employing aluminum-alloy materials in its construction, pitch
and yaw deviations caused by temperature fluctuations have been
minimized. This, combined with the fast, highly accurate stage
controls, increases both measurement accuracy and yield.
XY MPEE1: 2+8L/1000μm
XY MPEE2: 3+8L/1000μm
Z MPEE1: 3+L/50μm
Easy setup
Only an IEEE1394 port and a USB2.0 port are required to connect
a host computer to the iNEXIV controller. In addition, Nikon's new
image processing technology eliminates the need for a frame
grabber.
Table for the main body and PC rack are optional
4
200mm
USB2.0 port IEEE1394 port
New zooming optics make 3D parts measurements easier
White LED illumination for fast, high-accuracy measurement
Newly designed optics with an Apochromat LWD objective
lens
Nikon has developed a new optical system that covers low
magnifications, has a long working distance and is suitable for
measuring three-dimensional parts. The Apochromat objective lens
features low distortion (0.1% or less) while providing a long
73.5mm working distance throughout all magnification ranges.
Moreover, improvements in the LED illumination system also
increase image contrast by utilizing an Apochromatic lens to
compensate for the blue wavelengths emitted from white LEDs.
10x zoom with wide field of view
The VMA-2520 comes standard with a five-step, 10x zoom optical
system that provides both superb resolution at high magnification
and a wide field of view at low magnification. Greater position
accuracy, achieved by eliminating backlash in the zooming
mechanism when using the five-step zoom range, makes it ideal
for measurement applications.
High-intensity white LED light source for all
illumination systems
The VMA-2520 employs a white LED light source for episcopic
illumination, diascopic illumination and 8-segment LED ring
illumination. The high-intensity white LED features constant color
temperature and less flicker, thus it provides stable measurement
accuracy, particularly when observing color images. With the LED's
quick response to lighting controls, increased measurement
throughputs can be achieved.
8-segment LED ring illumination
This illumination system can be controlled from eight different
directions. The white LED light with an average incidence angle of
18° makes possible observations of extremely low-contrast edges
which are usually invisible under episcopic illumination. It is
effective for measuring molds, medical devices and other three-
dimensional parts.
Episcopic and diascopic illuminations
Both episcopic and diascopic illuminations employ a white LED
light source that provides high-intensity closer to that of a halogen
lamp. For the episcopic illumination, which previously did not use a
white LED light source, the VMA-2520 employs the first flyeye
integrator in a measuring system, realizing both sufficient NA and
uniform illumination over a wide field of view. The diascopic
illumination uses a white LED array, backlight system.
5
Optical magnification 0.35x 0.6x 1x 1.8x 3.5x
Magnification on screen 12x 20x 34x 62x 120x
(with 17" monitor at SXGA resolution)
Field of view 13.3 x10mm 7.8 x5.8mm 4.7 x3.5mm 2.6 x1.9mm 1.33 x1mm
Multiple sensors for high speed and accurate height detection -
Vision, Laser and Touch Probe
Optically independent Laser AF (option)
As well as the standard Vision AF, fast Laser AF that features a long
63mm working distance can be used as an option. The Laser AF for
the VMA-2520 employs a non-contact sensor that uses a red
semiconductor laser light as a fill light, and enables height
detection with sub-micrometer resolution. The Laser AF provides
fast and precise focusing on workpiece surfaces regardless of
optical magnification, making measuring the height of workpieces
easier.
High-speed, high-precision Vision AF
Thanks to the adoption of a new algorithm and a progressive scan
CCD camera, Vision AF now provides greater speeds and accuracy.
Vision AF is convenient for applications such as focusing surface
and edges of a workpiece.
Touch probe for height and side measurements
expand measuring area (option)
The iNEXIV VMA-2520 accepts the Renishaw® TP20 or TP200
Touch Trigger Probing system, making contact-probing
measurements possible. It detects surface and side coordinates for
complicated 3D parts, where vision sensing cannot be used. A
single part measurement program can incorporate Vision, Laser
and Touch Probing to realize multi-sensing metrology in the
common datum plane.
The TP20 is a kinematic touch trigger probe. The two-piece design
comprises a probe body and detachable stylus module(s) that can
automatically change stylus configurations.
The TP200 is an electronic probe that uses strain gauge
technology, which provides higher accuracy than kinematic touch
trigger probes. The TP200 system components are the TP200 probe
body, stylus module and PI200 probe interface.
The Probe Module Changing Rack
MCR20 customized for iNEXIV is
also available as an option. The
MCR20 is designed to securely
store different stylus modules
ready for rapid automatic
changing.
For attachment of styli that are longer
than 20mm or star-type styli, please
consult Nikon, authorized dealers or
distributors.
Surface focus
Renishaw® TP20 Touch Trigger
Probing system
Renishaw® TP200 & PI200 Probe Interface
Optional TP Interface controls up to 3
modules including five star styli. Please
consult Nikon for appropriate stylus
selection.
Calibration sphere and ring gauge
set included in the basic set
The iNEXIV Training Part (option) is
perfectly designed for the purpose
of comprehensive multi-sensing
metrology training. 2D/3D CAD
data and a GD&T compliant
drawing are included with the part.
Contrast focus
6
MCR20 Module Changing Rack
Renishaw® is a registered
trademark of Renishaw plc.
Nikon's advanced image processing algorithm
Advanced intelligent search
Easy selection of desired edges by eliminating dust
and burrs
Some workpieces contain multiple edges within a given caliper, or
their contrast is too low, making edge detection extremely difficult.
This function graphically profiles the contrasts of the image within
the caliper using a multi-gray-level scale, enabling the operator to
select any one of a number of edges. Selection of the desired edge
is simple: click the appropriate buttons in the edge selection menu
and adjust the threshold level using the mouse.
Video edge probes with auto best-fit function
When the operator clicks the point to be measured, the system
automatically rotates the probes, sets them at the optimum
position, and sets the probe size, all automatically.
In combination with Nikon's new image processing technology, the
VMA-2520 provides state-of-the art image processing. The digital
video image outputs are transferred to a PC's IEEE1394 port via
the controller and processed for sub-pixel level edge detection.
This eliminates the need for a frame grabber in the host computer
and enables high-speed, highly-accurate observations and
measurements. The 3CCD progressive scan color camera also
achieves FOV measurement repeatability equivalent to that of a
monochrome camera.
Drag to resize and fit the projection probe
to the edge
After this process
Dust clearly removed by the
projection probe
Edge selection graphic window
Finding a skewed part location and correcting positional deviations
of the edge probing points within a part are programmable by a
pattern-matching feature, eliminating possible measurement
errors.
MPS (Multi-Pattern Search)
Automatically corrects deviations between the edge probing points
programmed in a teaching file as well as irregular feature positions
without edge probing error.
APS (Auto Position Search)
Thanks to this function, the operator no longer needs to manually
place multiple workpieces in proper alignment; the iNEXIV
automatically searches workpiece location and its orientation.
Search on left-side mark Search on right-side mark
Before APS After APS
Normal pin location
Pattern matched on
abnormal pin location
Circle probe appears on the abnormal pin
location without measurement failure
7
User-friendly standard software iNEXIV VMA AutoMeasure
Main program layout
iNEXIV mode switcher to select proper
operation procedures
Selection of a teaching file with interactive guides
Interactive measurement wizards
The measurement wizards guide operators, step by step, through
what is required to achieve their tasks. In addition to the default
wizards, operators can create customized wizards by registering
frequently used procedures to streamline future operation.
Online CAD interface program
By importing a workpiece's CAD data in, for example, DXF format,
the operator can display graphics in the CAD graphic window on
iNEXIV VMA AutoMeasure. This facilitates efficiency in teaching
and shortens working time. The operator can move the stage to the
desired position by double-clicking the appropriate position within
the input workpiece. Also, it is possible to create a teaching file
automatically from CAD feature data on iNEXIV VMA
AutoMeasure.
The VMA AutoMeasure software provides enhanced ease of use and
versatility because it is based on years of extensive experience with
the NEXIV VMR series. An intuitive wizard menu and operation
window with large icons can be customized by selecting engineering
mode or operator mode. A specified GUI environment can be stored
with an individual ID using the ID registration function.
User teach files (parts measurement programs) can now be stored
with notes and images for easy recognition and recall. Even the
number of mouse clicks required for each operation has been
reduced to simplify and speed up the measurement process. Also,
iNEXIV VMA AutoMeasure supports a multiple-language
environment. The software can switch languages without having to
restart the program.
Measurement wizards
8
Digital Chart Comparator
VMA AutoMeasure supports Go/No-Go inspection by Charts
generated digitally from 2D CAD data. The digital chart is overlaid
with the Video Image and can be compared with it real-time. The
mode can also be used for recognition of difficult edge lines.
User-friendly standard software iNEXIV VMA AutoMeasure
Image Analysis & Archiving Program: NEXIV EDF/
Stitching Express
This optional software makes EDF - Extended Depth of Field -
images by extracting focused pixel information from multiple
captured images in Z-axis direction. Also, it generates stitching
images from different FOV images captured with CNC XY stage
motion, making a wide FOV observation possible. Both functions
contribute to image documentation.
Furthermore, the EDF Images can be stitched into a single
EDF Image with wide FOV and can be exported to a point cloud
data. The point cloud data can be used for 3D graphical
representation and/or 3D color error mapping by comparing with
3D CAD Data.
The 2D CAD overlay combined with the stitched EDF image will
produce a form inspection with accuracy and depth exceeding that
which can be achieved by eye.
Two-dimensional profile shape analysis program:
iNEXIV VMA Profiler/CAD Reader
iNEXIV VMA Profiler makes it possible to measure and tolerance
2-dimensional profile shapes in a workpiece that cannot be
measured in the normal geometric mode. Now more accurate
quantitative measurements can be taken than with the chart
comparison method using profile projectors and/or conventional
measuring microscopes. With the iNEXIV VMA CAD Reader
nominal shape data can be created from CAD data in the DXF/
IGES file format.
CAD interface off-line teaching support program:
iNEXIV VMA Virtual AutoMeasure
This program enables CAD data to be read into the Virtual Video
Window on a separate computer, allowing the operator to use
iNEXIV's teaching program with the same operational procedures
as on the online computer. This eliminates the necessity of using an
actual workpiece during teaching sessions and lets the iNEXIV
VMA system concentrate on automatic measurement for increased
productivity. The software imports IGES, DXF, DMIS, NC files,
Gerber, and so on.
Gear evaluation software
This software provides evaluations on various parameters of a
measured workpiece, including pitch deviations, tooth space
runout, base tangent length, and dimension overpin, based on
industrial standards.
2D CAD Overlay with EDF Image
9
EDF (Extended Depth of Field) and Point
Cloud Inspection with 3D CAD by
Rapidform XOV/Verifier.
Rapidform XOV®is a product of INUS
Technology, Inc.
Report and chart generating program: Custom Fit QC
Suitable for lot control of inspection data such as maximum value,
minimum value, range, standard deviation and process capability
index.
In addition to 10 standard inspection result sheet forms, it is
possible to customize original forms.
Codevelopment: Aria Co., Ltd.
Real-time SPC via DDE (Dynamic Data Exchange)
Using a DDE Link function, measured data can be immediately
transferred to spreadsheets such as Microsoft Excel®, SPC-PC IV,
SPC-PC IV Excel, and others, making real-time SPC analysis
possible.
Note: SPC-PC IV and SPC-PC IV Excel are products of Quality America Inc.
Nikon rotary indexer RI-3600L
The RI-3600L can rotate the image of a workpiece and display it
with a 0.01 resolution. Because it can be controlled externally, it
enables automatic measurements while controlling the posture of
the workpiece.
Minimum readout: 1"
Control resolution: 0.01°
Max. workpiece diameter: 75mm
Operation mode: Auto or Manual
Pre-set points: Point of origin and 3 others
Report generating program: VMR Report Generator
This software enables quick generation of inspection result sheets
in various report forms including user-designed forms. Users can
even customize the program by creating macro scripts to meet any
special requirements.
Codevelopment: Pronics Co., Ltd.
10
Off-line 3D teaching program: 3D Metrology Simulator
The 3D Metrology Simulator is a simple and affordable program to
create feature measurements from 3D CAD Model. The simulator
mode will check the probing motion and interference with objects
prior to actual measurement.
The optional plug-in, "spGate-Auto" to import different 3D CAD
data - IGES, STEP, Parasolid and so on - is also available.
Note: "spGate-Auto" is a product of Armonicos.
280 20XM6 Depth 10
440
230
360
6060
60
3030 300
40
60 60 60 60 60
360 40
9090
7070
250 (
Measurement Rang
)
200 (
Measurement Range
)
Top view of stage
CT
208
210
245.5
303
1357 to 1557
740 to 940
145
400
380
690
420
600
825
600
650
650
700
500
Specifications
iNEXIV VMA-2520 main body
Stroke (X x Y x Z) 250 x 200 x 200mm (10"x 8"x 8")
Common measurement range
With Touch Probing 200 x 200 x 166mm (TP20)
200 x 200 x 170mm (TP200)
With TP & MCR20 175 x 200 x 166mm (TP20)
175 x 200 x 170mm (TP200)
Minimum readout 0.1μm
Maximum workpiece weight 15kg (up to 5kg accuracy guaranteed)
MPE* XY MPEE1: 2+8L/1000μmm (
with Vision Probing
)
XY MPEE2: 3+8L/1000μm (
with Vision Probing
)
Z MPEE1: 3+L/50μm (
with Laser AF or Touch Probing
)
Repeatability (2σ)* Vision Probing: 1μm
Laser AF: 1μm
Touch Probing: 1μm (probe operates in all
three axis directions)
Camera 1/3-in. 3CCD color
Progressive scan (B/W optional)
Working distance 73.5mm (63mm with LAF)
Magnification Optical: 0.35 to 3.5x
On screen: 12 to 120x (with 17" monitor at
SXGA resolution)
See page 5 for details
FOV size 13.3 x 10 to 1.33 x 1mm
Auto focus Vision AF and optional Laser AF
Illumination
Contour illumination White LED illumination
Surface illumination White LED illumination
Oblique illumination 8-segment white LED ring
Video resolution 640 x 480 (pixels)
Touch probe Renishaw® TP200/TP20 (option)
Power source 100V-240V, 50/60Hz
Power consumption 5A-2.5A
(excluding power consumption of host
computer and its peripherals)
Dimensions & weight
Main body (W x D x H) 565 x 690 x 740mm (minimum height), 72kg
Controller 145 x 400 x 390mm, 13kg
Table for main body (option) 600 x 700 x 825mm, 38kg
Recommended workbench Min. load capacity 1000kg or more
Operational environment
Temperature 10°C to 35°C
Humidity 70% or less
Host computer
CPU Intel Core 2 Duo 1.8GHz or faster
Graphic Card For 3D Application programs, please consult Nikon
Memory 2G or more
Operating system Windows® XP Pro SP2/Vista Business or later
Interface USB2.0/IEEE1394
*Nikon's in-house test at 20°C ±0.5k
Dimensional diagram
11
Unit: mm
CLASS 1 LASER PRODUCT
200
5
175
2252.5
(100)
93
7
16634
50
Vision/TP Offset (X)
Vision/TP Common
Measurement Range
(Hatching Area)
Vision Measurement Range
Mechanical Coordinate
Origin (0, y, 0)
Front view with TP20 & MCR20 Unit: mm
Unit: mm
